SEMETROL - Semiconductor Metrology Solutions

New standards in resolution and sensitivity for characterization.

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Semiconductor Metrology Systems and Metrology Services:
  • Deep Level Transient Spectroscopy (DLTS)
  • Current-Voltage-Temperature (I-V-T)
  • Capacitance-Voltage (C-V)
  • Thermal Admittance Spectroscopy (TAS)
  • Photocapacitance (PC)

Also:

  • Customized metrology software and metrology equipment
  • Characterization and analysis metrology services

SEMETROL metrology software and metrology equipment are the result of several iterations in various configurations, providing you with the best semiconductor material characterization solutions. The founder has over 20 years of experience with semiconductor characterization and analysis in both DoD and University laboratory environments, and has published extensively on characterization of materials such as GaAs, InGaAs, GaSb, AlGaSb, GaN, AlGaN, ZnO and SiC.

The benefits of SEMETROL's DLTS metrology equipment are listed on the right. Similar benefits can be expected from the other metrology software and metrology equiment characterization products, such as Current-Voltage-Temperature (IVT), Capacitance-Voltage (CV), Thermal Admittance Spectroscopy (TAS), Photocapacitance (PC), and variations of DLTS (Optical DLTS, CC-DLTS, DDLTS for field dependence and spatial profiling). Each can be tailored to your particular requirements, including customized user interface and physics-based analysis.


Benefits of Semetrol DLTS system:

  • High sensitivity: Detect defect concentrations five orders of magnitude lower than the shallow carrier concentration. User controlled sensitivity - average thousands of transients together.

  • Efficient: Typically takes ~1/2 day from start to finish, or about an hour for a quick survey of traps. Data collection is automated, freeing you for other activity.

  • User Control: Easily optimize and set the data collection conditions. Interactive analysis. Graphical view of how well the transients are fit, as well as numerical figures of merit.

  • Accurate: With SEMETROL's DLTS system, Arrhenius plots are typically over more than three decades on e/T2 versus 1/kT plot - determined by number of points collected, and noise level.

  • Complete: Check measured signals against simulated data. Analyze data using any of three methods.

  • Convenient: All data and analysis can be saved in a form useful for publication, or comparison to other data.

  • Similar benefits implemented in other characterization systems available from SEMETROL.

Products:

Deep Level Transient Spectroscopy
Capacitance-Voltage
Thermal Admittance Spectroscopy
Current-Voltage-Temperature
Photocapacitance


Combined DLTS, IVT, TAS System. Closed-cycle helium refrigerator not shown. Small footprint.


User interface for DLTS data collection.

User interface for Thermal Admittance Spectroscopy program.